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Thickness-dependent band gap and defect features of ultrathin ZrO2 films studied by spectroscopic ellipsometry

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Phys. Chem. Chem. Phys., 2015, Accepted Manuscript
DOI: 10.1039/C5CP05592J, Paper
Ji-Ping Xu, Rongjun Zhang, Yuan Zhang, Zi-Yi Wang, Lei Chen, Qing-Hua Huang, Hong-Liang Lu, Songyou Wang, Yuxiang Zheng, Liangyao Chen
The band gap and defect features of ultrathin ZrO2 films with varying thickness have been investigated by spectroscopic ellipsometry through point-by-point data inversion method. The ε2-sprectra in 3-6 eV is...
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