Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition

Phys. Chem. Chem. Phys., 2016, 18,1042-1049
DOI: 10.1039/C5CP06713H, Paper

Lae Ho Kim, Yong Jin Jeong, Tae Kyu An, Seonuk Park, Jin Hyuk Jang, Sooji Nam, Jaeyoung Jang, Se Hyun Kim, Chan Eon Park
The shelf-life of the OLED devices passivated with and without PEALD-based films at 60 [degree]C and 90% RH.
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